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Layer by layer penetration
Online 3D Topography Measurement.
Diligine’s latest Optical Tomography Scanner utilizes Optical Coherence Tomography (OCT) imaging technology, which is unaffected by material or color. The combination of a high-speed scanning galvanometer and a telecentric lens enables online 3D topography measurement and quality inspection with a maximized field of view.
Online high-precision measurement:
Identifying hidden internal defects.
Versatile
Transparent / Opaque workpieces
Transparent / Opaque workpieces
Workpieces of various colors
Deep holes, grooves, and sidewall areas with minimal risk of shadowing
High-Precision
High-speed sampling at 90 kHz
Axial resolution of 1 μm
Measurement range options: 3mm / 9mm
Maximum measurement field: 50 mm x 50 mm
High Stability
Unaffected by stray light
Telecentric imaging with no blind spots
Non-contact measurement
Utilizes common-path interferometry for strong anti-interference capability
OTS Application cases
The above is not a complete list. For more types, please
consult for more types
consult for more types
OTS Application Case - Casing Burst Hole
Microscope shows a defect width of approximately 0.0645 mm. OTS scanning across the entire field to locate the defect position, with a protrusion height of about 60 μm.
OTS Application Case - Square Battery Cathode
OTS scanning across the entire field reveals undulating weld marks in the welding zone. A small hole with no return light signal appears in the central area, identified as a burn-through.
Parameter
|
Product Model
|
OTS30
|
OTS56
|
|
Measured Value
|
Distance,Thickness
|
|
|
Sampling Frequency
|
Max 250kHz | |
|
Light Source
|
SLD | |
|
Wavelength
|
840nm | |
|
Measurable Field of View
|
30nm×30nm | 56nm×56nm |
|
Spot Size
|
22μm※1 | 30μm※1 |
|
Thickness Measuring Range
|
3mm
|
9mm
|
|
Working Distance
|
94mm
|
150mm
|
|
Min. Measured Thickness
|
15μm※2 | 15μm※2 |
|
Rated Power
|
90w | 90w |
|
Operating Temperature
|
+10℃ ~ +45℃
|
|
|
Relative Humidity
|
≤ 90%
|
|
|
Protection Level
|
IP50
|
|
|
(W×D×H) Two-axis scanning module dimensions
|
156.7 mm × 77 mm × 87 mm
|
|
|
(H×Ø) Field lens dimensions
|
114 mm × Ø59.5 mm
|
200 mm × Ø125 mm
|
|
Lateral Resolution
|
11μm
|
15μm
|
|
Axial Resolution
|
Phase Method：1 μm
|
Phase Method：1 μm
|
Note：
※1 Incidence at the center of the field lens
※2 The actual minimum measurable thickness must be divided by the refractive index of the sample
